M.aI.N Group

Laser-assisted chemical vapor deposition (LACVD) method is developed for synthesis of carbon nanotubes (CNTs) on suspending microstructures using local infrared laser heating. CNTs can be rapidly synthesized without causing damage to circuits on substrate of fabricated sensors.

Nanowires have recently been under intensive research as novel building blocks for various applications, including nanoelectronic sensors and resonators. We are devoted to find CMOS-Compatible and low cost method to fabricate silicon nanowires with high yield and excellent integrability, and further explore their use in high-sensitivity biosensors and NEMS devices.

The length of the SNWs is 50 μm, and the pitch is 40 μm. The overall diameter of the nanowires is 380 nm, which includes a 180 nm silicon core and a 100 nm SiO2 insulation shell.

For pH measurement, the solution is dipped onto the gate surface that is covered with a SiN passivation layer. The source/drain are free of solution.



For pH measurement, the solution is dipped onto the gate surface that is covered with a SiN passivation layer. The source/drain are free of solution.